Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1203-1208
http://dx.doi.org/10.1351/pac199870061203
Process control of organosilicon plasmas for barrier film preparations
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Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1203-1208
http://dx.doi.org/10.1351/pac199870061203