Author detail
Articles by Vincent M. Donnelly
- Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas
- Surface chemistry during plasma etching of silicon
Coauthors
- Joydeep Guha (1 article)
- Luc Stafford (1 article)
- Stefano Mattei (1 article)
- Rohit Khare (1 article)
- Olivier Boudreault (1 article)
- C. C. Cheng (1 article)
- I. P. Herman (1 article)
- K. V. Guinn (1 article)
- Boris Clain (1 article)
Affiliations
- Department of Chemical and Biomolecular Engineering, University of Houston, Houston, TX 77204, USA