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Articles by Joydeep Guha

  • Luc Stafford, Joydeep Guha, Rohit Khare, Stefano Mattei, Olivier Boudreault, Boris Clain and Vincent M. Donnelly
    Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas



  • Department of Chemical and Biomolecular Engineering, University of Houston, Houston, TX 77204, USA
  • Lam Research Corporation, Fremont, CA 94538, USA