Pure and Applied Chemistry

Author detail

Articles by Masaharu Shiratani

• Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga and Yukio Watanabe

  Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition

  2005, Vol. 77, Issue 2, pp. 391-398 [Details + Abstract] [Full text - pdf 293 kB]

The following name might also represent this author:

M. Shiratani

• Y. Watanabe, M. Shiratani and K. Koga

  Clustering phenomena in low-pressure reactive plasmas. Basis and applications

  2002, Vol. 74, Issue 3, pp. 483-487 [Details + Abstract] [Full text - pdf 188 kB]

Coauthors

• Makoto Kita (1 article)
• Manabu Takeshita (1 article)
• Kosuke Takenaka (1 article)
• Kazunori Koga (1 article)
• Yukio Watanabe (1 article)

Affiliations

• Department of Electronics, Kyushu University, Fukuoka, Japan