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Articles by Makoto Kita

  • Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga and Yukio Watanabe
    Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition

Coauthors

Affiliations

  • Department of Electronics, Kyushu University, Fukuoka, Japan