Pure and Applied Chemistry

Author detail

Articles by M. J. Thoma

• A. S. Harrus, G. W. Hills and M. J. Thoma

  The effect of non-reactive ions on the properties of PECVD (plasma enhanced chemical vapor deposition) TEOS (tetraethoxysilane) oxides

  1990, Vol. 62, Issue 9, pp. 1757-1760 [Details] [Full text - pdf 1234 kB]

Coauthors

• G. W. Hills (1 article)
• A. S. Harrus (1 article)