Author detail
Articles by Loic Ledernez
- Electron dynamics of low-pressure deposition plasma
Coauthors
- Gerald Urban (1 article)
- Hirotsugu Yasuda (1 article)
- Fethi Olcaytug (1 article)
Affiliations
- Laboratory for Sensors, Department of Microsystems Engineering, Albert-Ludwigs-University of Freiburg, Freiburg, Germany