Pure and Applied Chemistry

Author detail

Articles by Hirotsugu Yasuda

• Hirotsugu Yasuda, Loic Ledernez, Fethi Olcaytug and Gerald Urban

  Electron dynamics of low-pressure deposition plasma

  2008, Vol. 80, Issue 9, pp. 1883-1892 [Details + Abstract] [Full text - pdf 708 kB]

Coauthors

• Gerald Urban (1 article)
• Fethi Olcaytug (1 article)
• Loic Ledernez (1 article)

Affiliations

• Laboratory for Sensors, Department of Microsystems Engineering, Albert-Ludwigs-University of Freiburg, Freiburg, Germany