Pure and Applied Chemistry, 2008, Volume 80, No. 9, pp. 1883-1892, Other PAC articles by these authors

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Pure Appl. Chem., 2008, Vol. 80, No. 9, pp. 1883-1892

http://dx.doi.org/10.1351/pac200880091883

Electron dynamics of low-pressure deposition plasma

Hirotsugu Yasuda, Loic Ledernez, Fethi Olcaytug and Gerald Urban

Laboratory for Sensors, Department of Microsystems Engineering, Albert-Ludwigs-University of Freiburg, Freiburg, Germany

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