Pure Appl. Chem., 2006, Vol. 78, No. 6, pp. 1173-1185
http://dx.doi.org/10.1351/pac200678061173
Reduction of perfluorinated compound emissions using atmospheric pressure microwave plasmas: Mechanisms and energy efficiency
Individual author index pages
Other PAC articles by these authors
Processing of electronic materials by microwave plasma
Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films