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Pure Appl. Chem., 2006, Vol. 78, No. 6, pp. 1173-1185

http://dx.doi.org/10.1351/pac200678061173

Reduction of perfluorinated compound emissions using atmospheric pressure microwave plasmas: Mechanisms and energy efficiency

M. Nantel-Valiquette1, Y. Kabouzi1, E. Castaños-Martinez1, K. Makasheva1, M. Moisan1 and J. C. Rostaing2

1 Groupe de Physique des Plasmas, Université de Montréal, Montréal H3C 3J7, Québec, Canada
2 Air Liquide, Recherche et Dévelopement,78354 Les Loges-en-Josas, France

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Other PAC articles by these authors

M. R. Wertheimer and M. Moisan
Processing of electronic materials by microwave plasma
1994, Vol. 66, Issue 6, pp. 1343-1352 [Details] [Full text - pdf 844 kB]
M. R. Wertheimer, M. Moisan, J. E. Klemberg-Sapieha and R. Claude
Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
1988, Vol. 60, Issue 5, pp. 815-820 [Details] [Full text - pdf 515 kB]