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Pure Appl. Chem., 2002, Vol. 74, No. 9, pp. 1519-1526

Structural variations in nanocrystalline nickel films

Pratibha L. Gai1,2*, Rahul Mitra3,4 and Julia R. Weertman3

1 DuPont, Central Research, Experimental Station, Wilmington, DE 19880-0356, USA
2 University of Delaware, Department of Materials Science and Engineering, Newark, DE 19716, USA
3 Northwestern University, Department of Materials Science, Evanston, IL 60208, USA
4 Defence Metallurgical Research Laboratory, Hyderabad, India

Abstract: Nanocrystalline nickel films of technological importance have been grown on various liquid nitrogen-cooled substrates by magnetron sputtering with and without a substrate bias. The atomic structural and chemical studies have unveiled variations in inter- and intragranular structures under the different process conditions. The origin and the development of the crystallization process with and without the substrate bias voltage have been inferred from the results.