Pure Appl. Chem., 2002, Vol. 74, No. 9, pp. 1519-1526
http://dx.doi.org/10.1351/pac200274091519
Structural variations in nanocrystalline nickel films
Abstract:
Nanocrystalline nickel films of technological importance have been grown on various liquid nitrogen-cooled substrates by magnetron sputtering with and without a substrate bias. The atomic structural and chemical studies have unveiled variations in inter- and intragranular structures under the different process conditions. The origin and the development of the crystallization process with and without the substrate bias voltage have been inferred from the results.