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Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 435-439

Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials

T. Ishigaki1*, N. Okada1, N. Ohashi1, H. Haneda1 and T. Sakuta2

1 Advanced Materials Laboratory, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
2 Department of Electrical and Electronic Engineering, Kanazawa University, Kodatsuno, Kanazawa, Ishikawa 920-0942, Japan

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Other PAC articles by these authors

T. Sakuta and T. Ishigaki
Non-equilibrium effects in pulse modulated induction thermal plasma for advanced material processing
1999, Vol. 71, Issue 10, pp. 1845-1852 [Details] [Full text - pdf 967 kB]