Author detail
Articles by H. Haneda
- Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials
Coauthors
- N. Okada (1 article)
- T. Sakuta (1 article)
- N. Ohashi (1 article)
- T. Ishigaki (1 article)
Affiliations
- Advanced Materials Laboratory, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan