Synthesis of ceramic films on metallic substrates using magnetron-sputtering 
          deposition synchro-enhanced by microwave ECR plasma source ion implantation 
          under high vacuum conditions

PAC → Archive → Vol. 70 (1998) → Issue 6 → Synthesis of ceramic films on metallic…

Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1199-1202

http://dx.doi.org/10.1351/pac199870061199

Tengcai Ma, Xinlu Deng, Wenqi Lu and J. Zhang

First page:

Pure and Applied Chemistry