Pure and Applied Chemistry, 1994, Volume 66, No. 6, pp. 1343-1352, Other PAC articles by these authors

PAC → Archive → Vol. 66 (1994) → Issue 6 → Processing of electronic materials by… → Other PAC articles by these authors

Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1343-1352

http://dx.doi.org/10.1351/pac199466061343

Processing of electronic materials by microwave plasma

M. R. Wertheimer and M. Moisan

M. Nantel-Valiquette, Y. Kabouzi, E. Castaños-Martinez, K. Makasheva, M. Moisan and J. C. Rostaing

Reduction of perfluorinated compound emissions using atmospheric pressure microwave plasmas: Mechanisms and energy efficiency

M. R. Wertheimer, H. R. Thomas, M. J. Perri, J. E. Klemberg-Sapieha and L. Martinu

Plasmas and polymers: From laboratory to large scale commercialization

M. R. Wertheimer, M. Moisan, J. E. Klemberg-Sapieha and R. Claude

Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films