Pure and Applied Chemistry, 1990, Volume 62, No. 9, pp. 1751-1756

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Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1751-1756

http://dx.doi.org/10.1351/pac199062091751

ECR (electron cyclotron resonance) plasma for thin film technology

S. Nakayama

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Conference

Ninth International Symposium on Plasma Chemistry, Pugnochiuso, Italy, 4–8 September 1989

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Cited by 4 articles Other PAC articles by these authors

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