CrossRef enabled

PAC Archives

Archive →

Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1721-1728

http://dx.doi.org/10.1351/pac199062091721

Electron energy distribution functions in processing plasmas

N. St. J. Braithwaite

CrossRef Cited-by theme picture

CrossRef Cited-by Linking

  • Conway J, Kechkar S, O' Connor N, Gaman C, Turner M M, Daniels S: Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density. Plasma Sources Sci. Technol. 2013, 22, 045004. <http://dx.doi.org/10.1088/0963-0252/22/4/045004>
  • Sirse N, Karkari S K, Mujawar M A, Conway J, Turner M M: The temporal evolution in plasma potential during laser photo-detachment used to diagnose electronegative plasma. Plasma Sources Sci Technol 2011, 20, 055003. <http://dx.doi.org/10.1088/0963-0252/20/5/055003>
  • Saloum S, Akel M, Alkhaled B: Effect of electron energy probability function on plasma CVD/modification in a 13.56 MHz hollow cathode discharge. J Phys D Appl Phys 2009, 42, 085201. <http://dx.doi.org/10.1088/0022-3727/42/8/085201>
  • Shpilman Z., Gouzman I., Lempert G., Grossman E., Hoffman A.: rf plasma system as an atomic oxygen exposure facility. Rev Sci Instrum 2008, 79, 025106. <http://dx.doi.org/10.1063/1.2885044>
  • Visser R. J., Baggerman J. A. G., Poppelaars J. P. J., Collart E. J. H.: The time evolution of the ion density and the gas temperature in pulsed radio frequency plasmas. J Appl Phys 1992, 71, 5792. <http://dx.doi.org/10.1063/1.350473>