Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1721-1728
http://dx.doi.org/10.1351/pac199062091721
Electron energy distribution functions in processing plasmas
First page:
Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1721-1728
http://dx.doi.org/10.1351/pac199062091721