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Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1689-1698

http://dx.doi.org/10.1351/pac199062091689

A growth mechanism for the vacuum deposition of polymeric materials

H. K. Yasuda, Y. S. Yeh and S. Fusselman

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  • Kahouli Abdelkader, Sylvestre Alain, Jomni Fethi, Yangui Béchir, Legrand Julien: Experimental and Theoretical Study of AC Electrical Conduction Mechanisms of Semicrystalline Parylene C Thin Films. J Phys Chem A 2012, 116, 1051. <http://dx.doi.org/10.1021/jp207114u>
  • Du Wenqin, Di Janfeng: Sputter-deposited nanostructure of polymeric fluorocarbon coatings on polyethylene terephthalate fiber. Surface Coatings and Technology 2007, 201, 5498. <http://dx.doi.org/10.1016/j.surfcoat.2006.07.068>
  • Lee Young H, Yi Jeong W, Farouk Bakhtier: Effects of gas composition and r.f. power on properties of a–C:H/SiC:H composite films grown by plasma-enhanced chemical vapor deposition. This Solid Films 1998, 326, 154. <http://dx.doi.org/10.1016/S0040-6090(98)00565-3>
  • Kim Dong S, Lee Young H: Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD. This Solid Films 1996, 283, 109. <http://dx.doi.org/10.1016/0040-6090(96)08820-7>
  • Chan C.-M., Ko T.-M., Hiraoka H.: Polymer surface modification by plasmas and photons. Surf Sci Rep 1996, 24, 1. <http://dx.doi.org/10.1016/0167-5729(96)80003-3>
  • Gaynor Justin F., Jay Senkevich J., Desu Seshu B.: A new method for fabricating high performance polymeric thin films by chemical vapor polymerization. J Mater Res 1996, 11, 1842. <http://dx.doi.org/10.1557/JMR.1996.0233>