Pure and Applied Chemistry

Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1661-1666

http://dx.doi.org/10.1351/pac199062091661

Plasma deposition of semiconductor multilayer structures

Individual author index pages

• Masataka Hirose
• S. Miyazaki

Other PAC articles by these authors

No other articles by these authors.