Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1661-1666
http://dx.doi.org/10.1351/pac199062091661
Plasma deposition of semiconductor multilayer structures
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Pure Appl. Chem., 1990, Vol. 62, No. 9, pp. 1661-1666
http://dx.doi.org/10.1351/pac199062091661