Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 795-808
http://dx.doi.org/10.1351/pac198860050795
Expanding plasma used for plasma deposition
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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 795-808
http://dx.doi.org/10.1351/pac198860050795