Pure and Applied Chemistry, 1988, Volume 60, No. 5, pp. 781-794

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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 781-794

http://dx.doi.org/10.1351/pac198860050781

Ionized cluster beam (ICB) deposition and processes

T. Takagi

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Conference

Eighth International Symposium on Plasma Chemistry, Tokyo, Japan, 31 August–4 September 1987

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