Pure and Applied Chemistry

Keyword detail

Articles with keyword "silane"

D. Mataras
Exploration of the deposition limits of microcrystalline silicon
2005, Vol. 77, Issue 2, pp. 379-389 [Details + Abstract] [Full text - pdf 323 kB]
Maxime Mikikian, Marjorie Cavarroc, Lénaïc Couëdel, Yves Tessier and Laïfa Boufendi
Dust particles in low-pressure plasmas: Formation and induced phenomena
2010, Vol. 82, Issue 6, pp. 1273-1282 [Details + Abstract] [Full text - pdf 975 kB]