Pure and Applied Chemistry

Keyword detail

Articles with keyword "plasma–surface interactions"

K. Nordlund, E. Salonen, A. V. Krasheninnikov and J. Keinonen
Swift chemical sputtering of covalently bonded materials
2006, Vol. 78, Issue 6, pp. 1203-1211 [Details + Abstract] [Full text - pdf 382 kB]
Annemie Bogaerts, Christophe De Bie, Maxie Eckert, Violeta Georgieva, Tom Martens, Erik Neyts and Stefan Tinck
Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas
2010, Vol. 82, Issue 6, pp. 1283-1299 [Details + Abstract] [Full text - pdf 1333 kB]