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plasma-enhanced chemical vapor deposition
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Keyword detail
Articles with keyword "plasma-enhanced chemical vapor deposition"
Steven L. Girshick and Sarah J. Warthesen
Nanoparticles and plasmas
2006
,
Vol. 78
,
Issue 6
, pp. 1109-1116 [
Details + Abstract
] [
Full text - pdf 209 kB
]
Lenka Zajíčková, Ondrej Jašek, Marek Eliáš, Petr Synek, Lukáš Lazar, Oldřich Schneeweiss and Renáta Hanzlíková
Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch
2010
,
Vol. 82
,
Issue 6
, pp. 1259-1272 [
Details + Abstract
] [
Full text - pdf 858 kB
]