16th International Symposium on Plasma Chemistry (ISPC-16), Taormina, Italy, 22–27 June 2003
This conference is part of the Plasma Chemistry series.
Plasma diagnostics by laser spectroscopic electric field measurement
Three-dimensional modeling of inductively coupled plasma torches
Laminar plasma jets: Generation, characterization, and applications for materials surface processing
Exploration of the deposition limits of microcrystalline silicon
Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition
Deposition mechanism of nanostructured thin films from tetrafluoroethylene glow discharges
Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena
Three-dimensional transition map of flattening behavior in the thermal spray process
Diagnostics for advanced materials processing by plasma spraying
Spectroscopic and electrical study of rare-gas-based, hollow cathode luminescent discharges: Application to the lifetime and efficiency enhancement of mercury-free signs
Thermal plasma deposition from thick to thin coatings and from micro- to nanostructure
Atmospheric pressure plasma of dielectric barrier discharges
Addendum - Recent advances in plasma techniques for biomedical and drug engineering