Pure and Applied Chemistry, Articles of R. P. Brinkman

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Articles by R. P. Brinkman

R. P. Brinkman, Matthias Kratzer and H. Schmidt

Simulation of plasma processes for microelectronic fabrication

1999, Vol. 71, Issue 10, pp. 1863-1869 [Details] [Full text - pdf 1055 kB]

Coauthors

H. Schmidt (1 article)
Matthias Kratzer (1 article)