Author detail
Articles by P. Capezzuto
- Plasmasurface interactions in the processing of iiiv semiconductor materials
- Plasma deposition of amorphous silicon alloys from fluorinated gases
- Novel approaches to plasma deposition of amorphous silicon-based materials
- Plasma deposition of amorphous silicon films: an overview on some open questions
- Mechanism of etching, polymerization and deposition in R.F. (radio frequency) discharges
Coauthors
- G. Bruno (5 articles)
- G. Cicala (2 articles)
- F. Cramarossa (1 article)
- R. d’Agostino (1 article)
- M. Losurdo (1 article)