Pure and Applied Chemistry

Author detail

Articles by Makoto Kita

• Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga and Yukio Watanabe

  Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition

  2005, Vol. 77, Issue 2, pp. 391-398 [Details + Abstract] [Full text - pdf 293 kB]

Coauthors

• Yukio Watanabe (1 article)
• Masaharu Shiratani (1 article)
• Kosuke Takenaka (1 article)
• Kazunori Koga (1 article)
• Manabu Takeshita (1 article)

Affiliations

• Department of Electronics, Kyushu University, Fukuoka, Japan