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Author detail
Articles by L. J. Mahoney
A. E. Wendt and L. J. Mahoney
Radio frequency inductive discharge source design for large area processing
1996
,
Vol. 68
,
Issue 5
, pp. 1055-1058 [
Details
] [
Full text - pdf 387 kB
]
Coauthors
A. E. Wendt
(
1
article)