Author detail
Articles by Joydeep Guha
- Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas
Coauthors
- Olivier Boudreault (1 article)
- Vincent M. Donnelly (1 article)
- Luc Stafford (1 article)
- Stefano Mattei (1 article)
- Rohit Khare (1 article)
- Boris Clain (1 article)
Affiliations
- Department of Chemical and Biomolecular Engineering, University of Houston, Houston, TX 77204, USA
- Lam Research Corporation, Fremont, CA 94538, USA