Pure and Applied Chemistry, Articles of Jean-Paul Booth

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Articles by Jean-Paul Booth

Jean-Paul Booth

Diagnostics of etching plasmas

2002, Vol. 74, Issue 3, pp. 397-400 [Details + Abstract] [Full text - pdf 177 kB]

Affiliations

Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, 91128 Palaiseau, France