Author detail
Articles by F. Fracassi
- Plasma and surface diagnostics in PECVD (plasma-enhanced chemical vapor deposition) from silicon containing organic monomers
- The chemistry of etching and deposition processes
- Chemistry of titanium dry etching in fluorinated and chlorinated gases
Coauthors
- R. d’Agostino (3 articles)
- P. Favia (1 article)
- R. Lamendola (1 article)