Pure and Applied Chemistry, Articles of F. Fracassi

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P. Favia, R. d’Agostino and F. Fracassi

Plasma and surface diagnostics in PECVD (plasma-enhanced chemical vapor deposition) from silicon containing organic monomers

1994, Vol. 66, Issue 6, pp. 1373-1380 [Details] [Full text - pdf 534 kB]
R. d’Agostino, F. Fracassi and R. Lamendola

The chemistry of etching and deposition processes

1994, Vol. 66, Issue 6, pp. 1185-1193 [Details] [Full text - pdf 591 kB]
F. Fracassi and R. d’Agostino

Chemistry of titanium dry etching in fluorinated and chlorinated gases

1992, Vol. 64, Issue 5, pp. 703-707 [Details] [Full text - pdf 400 kB]