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Pure Appl. Chem., 2010, Vol. 82, No. 6, pp. 1283-1299

Published online 2010-04-20

Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas

Annemie Bogaerts*, Christophe De Bie, Maxie Eckert, Violeta Georgieva, Tom Martens, Erik Neyts and Stefan Tinck

PLASMANT research group, Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk, Belgium

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