Pure Appl. Chem., 2010, Vol. 82, No. 6, pp. 1259-1272
http://dx.doi.org/10.1351/PAC-CON-09-09-38
Published online 2010-04-20
Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch
References
- 1. M. Meyyappan (Ed.). Carbon Nanotubes, Science and Applications, CRC Press, Boca Raton (2005).
- 2. V. Nanotechnology 14, 655 (2003). ( , F. Buonocore, G. Panzera, L. Occhipinti. http://dx.doi.org/10.1088/0957-4484/14/6/317)
- 3. F. Nanotechnology 17, 543 (2006). ( , K. Bolton. http://dx.doi.org/10.1088/0957-4484/17/2/034)
- 4. M. Plasma Sources Sci. Technol. 12, 205 (2003). ( , L. Delzeit, A. Cassell, D. Hash. http://dx.doi.org/10.1088/0963-0252/12/2/312)
- 5. D. B. J. Appl. Phys. 93, 750 (2003). ( , M. Meyyappana. http://dx.doi.org/10.1063/1.1525854)
- 6. S. Appl. Phys. Lett. 83, 135 (2003). ( , C. Ducati, J. Robertson. http://dx.doi.org/10.1063/1.1589187)
- 7. S. Appl. Phys. Lett. 83, 4661 (2003). ( , C. Ducati, B. Kleinsorge, J. Robertson. http://dx.doi.org/10.1063/1.1630167)
- 8. M. Nanolett. 6, 1107 (2006). , S. Hofmann, S. Pisana, V. Scardaci, A. Parvez, C. Ducati, A. Ferrari, A. M. Blackburn, K.-Y. Wang, J. Robertson.
- 9. A. Jorio, G. Dresselhaus, M. Dresselhaus (Eds.). Carbon Nanotubes: Advanced Topics in the Synthesis, Structure, Properties and Applications, Springer (2008).
- 10. J. Nature 395, 878 (1998). ( , H. Soh, A. Cassell, C. Quate, H. Dai. http://dx.doi.org/10.1038/27632)
- 11. J. Chem. Phys. Lett. 292, 567 (1998). ( , A. Cassell, H. Dai. http://dx.doi.org/10.1016/S0009-2614(98)00745-3)
- 12. H. Chem. Phys. Lett. 260, 471 (1996). ( , A. Rinzler, P. Nikolaev, A. Thess, D. Colbert, R. Smalley. http://dx.doi.org/10.1016/0009-2614(96)00862-7)
- 13. J. Chem. Phys. Lett. 296, 195 (1998). ( , M. Bronikowski, B. Azamian, P. Nikolaev, A. Rinzler, D. Colbert, K. Smith, R. Smalley. http://dx.doi.org/10.1016/S0009-2614(98)01024-0)
- 14. S. Chem. Phys. Lett. 360, 229 (2002). ( , R. Kojima, Y. Miyauchi, S. Chiashi, M. Kohno. http://dx.doi.org/10.1016/S0009-2614(02)00838-2)
- 15. K. Science 306, 1362 (2004). ( , D. Futaba, K. Mizuno, T. Namai, M. Yumura, S. Iijima. http://dx.doi.org/10.1126/science.1104962)
- 16. J. Mater. Sci. Eng. 352, 308 (2003). , K. Umeda, K. Uchino, H. Nakashima, K. Muraoka.
- 17. C. Thin Solid Films 420-421, 225 (2002). ( , C. Lin, H. Chang, C. Kuo. http://dx.doi.org/10.1016/S0040-6090(02)00799-X)
- 18. J.-H. J. Vac. Sci. Technol. B 21, 1720 (2003). ( , T. Lee, J.-B. Yoo, C.-Y. Park, T. Jung, J. Kim, S. Yu, W. Yi. http://dx.doi.org/10.1116/1.1596220)
- 19. I. Carbon 41, 836 (2002). ( , A. Zolotukhin, A. Volkov, Y. Svirko. http://dx.doi.org/10.1016/S0008-6223(02)00402-5)
- 20. B. O. Nat. Mater. 1, 165 (2002). ( , V. Stolojan, R. Khan, S. Haq, S. Silva. http://dx.doi.org/10.1038/nmat755)
- 21. C. Nanotechnology 15, 176 (2003). ( , I. C. Leu, J. Yen, M. Hon. http://dx.doi.org/10.1088/0957-4484/15/1/034)
- 22. L. J. Appl. Phys. 91, 6027 (2002). ( , I. McAninch, B. Cruden, D. Hash, B. Chen, J. Han, M. Meyyappan. http://dx.doi.org/10.1063/1.1465101)
- 23. L. Nanotechnology 13, 280 (2002). ( , C. Nguyen, R. Stevens, J. Han, M. Meyyappan. http://dx.doi.org/10.1088/0957-4484/13/3/308)
- 24. I. J. Appl. Phys. 95, 2713 (2004). ( , S. Xu, J. Long, P. Rutkevych, N. Azarenkov, K. Ostrikov. http://dx.doi.org/10.1063/1.1642762)
- 25. T. Chem. Phys. Lett. 381, 422 (2003). ( , G. Jeong, T. Hirata, R. Hatakeyama, K. Tohji, K. Motomiya. http://dx.doi.org/10.1016/j.cplett.2003.10.007)
- 26. T. Nanotechnology 17, 2223 (2006). ( , R. Hatakeyama, K. Tohji. http://dx.doi.org/10.1088/0957-4484/17/9/025)
- 27. T. J. Phys. Chem. B 109, 19556 (2005). ( , G. Zhong, T. Aikawa, T. Yoshida, H. Kawarada. http://dx.doi.org/10.1021/jp054465t)
- 28. Y.-H. Carbon 44, 799 (2006). , S.-H. Kyung, C.-W. Kim, G.-Y. Yeom.
- 29. S.-J. Carbon 44, 1530 (2006). ( , Y.-H. Lee, C.-W. Kim, J.-H. Lee, G.-Y. Yeom. http://dx.doi.org/10.1016/j.carbon.2005.12.020)
- 30. S.-J. Thin Solid Films 506-507, 268 (2006). ( , Y.-H. Lee, C.-W. Kim, J.-H. Lee, G.-Y. Yeom. http://dx.doi.org/10.1016/j.tsf.2005.08.325)
- 31. S.-J. Surf. Coat. Technol. 201, 5378 (2007). ( , M. Voronko, Y.-H. Lee, C.-W. Kim, J.-H. Lee, G.-Y. Yeom. http://dx.doi.org/10.1016/j.surfcoat.2006.07.191)
- 32. T. Carbon 45, 364 (2007). ( , K. Ohnishi, K. Okazaki, U. Kortshagen. http://dx.doi.org/10.1016/j.carbon.2006.09.009)
- 33. T. J. Phys. D: Appl. Phys. 35, 2779 (2002). ( , Y. Kimura, K. Okazaki. http://dx.doi.org/10.1088/0022-3727/35/21/314)
- 34. T. J. Appl. Phys. 99, 024310 (2006). ( , T. Goto, K. Okazaki, K. Ohnishi, L. Mangolini, J. Heberlein, U. Kortshagen. http://dx.doi.org/10.1063/1.2163997)
- 35. H. Physica B 323, 277 (2002). ( , M. Ikeda, K. Hirahara, Y. Hibi, Y. Tao, P. A. Ruiz, T. Sakakibara, S. Itoh, S. Iijima. http://dx.doi.org/10.1016/S0921-4526(02)00998-5)
- 36. R. H. High Temp. Mater. Process. 10, 197 (2006). , E. I. Asinovsky, E. K. Isakaev, V. I. Kiselev.
- 37. O. Chem. Phys. Lett. 356, 189 (2002). ( , B. Stanseld, J.-P. Dodelet, A. Serventi, S. Désilets. http://dx.doi.org/10.1016/S0009-2614(02)00132-X)
- 38. C.-K. Carbon 41, 2555 (2003). ( , W. L. Perry, H. Xu, Y. Jiang, J. Phillips. http://dx.doi.org/10.1016/S0008-6223(03)00361-0)
- 39. L. Plasma Phys. Control. Fusion 47, B655 (2005). ( , M. Eliáš, O. Jašek, V. Kudrle, Z. Frgala, J. Matějková, J. Buršík, M. Kadlečíková. http://dx.doi.org/10.1088/0741-3335/47/12B/S48)
- 40. L. Plasma Process. Polym. 4, S245 (2007). ( , M. Eliáš, O. Jašek, Z. Kučerová, P. Synek, J. Matějková, M. Kadlečíková, M. Klementová, A. Vojačková. http://dx.doi.org/10.1002/ppap.200730710)
- 41. O. J. Phys. Chem. Solids 68, 738 (2007). ( , M. Eliáš, L. Zajíčková, Z. Kučerová, J. Matějková, A. Rek, J. Buršík. http://dx.doi.org/10.1016/j.jpcs.2007.01.039)
- 42. P. Chem. Phys. Lett. 313, 91 (1999). ( , M. Bronikowski, R. Bradley, F. Rohmund, D. Colbert, K. Smith, R. Smalley. http://dx.doi.org/10.1016/S0009-2614(99)01029-5)
- 43. H. Science 296, 884 (2002). ( , C. Xu, D. Wu, B. Wei, R. Vajtai, P. Ajayan. http://dx.doi.org/10.1126/science.1066996)
- 44. W. Chem. Phys. Lett. 359, 196 (2002). ( , F. Li, J. Chen, S. Bai, H.-M. Cheng. http://dx.doi.org/10.1016/S0009-2614(02)00686-3)
- 45. C. Carbon 41, 359 (2003). ( , M. S. Shaer, A. H. Windle. http://dx.doi.org/10.1016/S0008-6223(02)00314-7)
- 46. Z. J. Appl. Phys. Lett. 77, 3764 (2000). ( , B. Q. Wei, G. Ramanath, P. M. Ajayan. http://dx.doi.org/10.1063/1.1330751)
- 47. Y. J. Phys. Chem. 105, 11424 (2001). , W. Kim, Y. Zhang, M. Rolandi, D. Wang, H. Dai.
- 48. S. J. Appl. Phys. 98, 034308 (2005). ( , M. Cantoro, B. Kleinsorge, C. Casiraghi, A. Parvez, J. Robertson, C. Ducati. http://dx.doi.org/10.1063/1.1989432)
- 49. C. Carbon 41, 539 (2003). ( , J.-M. Bonard, P. Mauron, P. Sudan, A. Lepora, B. Grobety, A. Zuttel, L. Schlapbach. http://dx.doi.org/10.1016/S0008-6223(02)00362-7)
- 50. C. Chem. Phys. Lett. 312, 461 (1999). ( , D. Kim, T. Lee, Y. Choi, Y. Park, Y. Lee, W. Choi, N. Lee, G.-S. Park, J. Kim. http://dx.doi.org/10.1016/S0009-2614(99)01074-X)
- 51. C. Chem. Phys. Lett. 323, 554 (2000). ( , J. Park, S. Kang, J. Lee. http://dx.doi.org/10.1016/S0009-2614(00)00521-2)
- 52. C. Chem. Phys. Lett. 323, 560 (2000). ( , J. Park, J. Park. http://dx.doi.org/10.1016/S0009-2614(00)00548-0)
- 53. P. Carbon 40, 1339 (2002). ( , C. Emmenegger, A. Zuttel, C. Nutzedel, P. Suden, L. Schlabach. http://dx.doi.org/10.1016/S0008-6223(01)00295-0)
- 54. J. J. Chem. Phys. Lett. 292, 567 (1998). ( , A. M. Cassell, H. Dai. http://dx.doi.org/10.1016/S0009-2614(98)00745-3)
- 55. P. Diamond Relat. Mater. 12, 780 (2003). ( , C. Emmenegger, P. Sudan, P. Wenger, S. Rentsch, A. Zuttel. http://dx.doi.org/10.1016/S0925-9635(02)00337-0)
- 56. M. Appl. Phys. Lett. 62, 657 (1993). ( , M. Miki-Yoshida, L. Rendon, J. Santiesteban. http://dx.doi.org/10.1063/1.108857)
- 57. H. Surf. Sci. 500, 218 (2002). ( . http://dx.doi.org/10.1016/S0039-6028(01)01558-8)
- 58. O. A. J. Appl. Phys. 93, 4185 (2003). ( , S. Dittmar, R. E. Morjan, F. Rohmund, E. E. B. Campbell. http://dx.doi.org/10.1063/1.1559433)
- 59. C. L. J. Phys. Chem. B 106, 2429 (2002). ( , A. Kurtz, H. Park, C. M. Lieber. http://dx.doi.org/10.1021/jp0142278)
- 60. S. Nature 427, 426 (2004). ( , C. López-Cartes, J. Sehested, P. L. Hansen, B. S. Clausen, J. R. Rostrup-Nielsen, F. Abild-Pedersen, J. K. Norskov. http://dx.doi.org/10.1038/nature02278)
- 61. S. Phys. Rev. Lett. 95, 1 (2005). , G. Csányi, A. C. Ferrari, M. C. Payne, J. Robertson.
- 62. S. Nanotechnology 18, 015602 (2007). ( , C. M. Whelan, K. Maex. http://dx.doi.org/10.1088/0957-4484/18/1/015602)
- 63. H. Surf. Coat. Technol. 202, 3157 (2008). ( , G.-A. Cheng, R. Zheng, Y. Zhao, C. Liang. http://dx.doi.org/10.1016/j.surfcoat.2007.11.020)
- 64. J. H. Thin Solid Films 435, 318 (2003). ( , T. Y. Lee, S. H. Choi, J.-H. Han, J.-B. Yoo, C.-Y. Park, T. Jung, S. Yu, W. Yi, I. T. Han, J. M. Kim. http://dx.doi.org/10.1016/S0040-6090(03)00341-9)
- 65. M. S. Nanotechnology 16, 458 (2005). ( , R. E. Morjan, O. A. Nerushev, P. Lundgren, S. Bengtsson, P. Enokson, E. E. B. Campbell. http://dx.doi.org/10.1088/0957-4484/16/4/022)
- 66. Z. F. Science 282, 1105 (1998). ( , Z. P. Huang. http://dx.doi.org/10.1126/science.282.5391.1105)
- 67. S. H. Appl. Phys. Lett. 74, 3462 (1999). ( , C. W. Chao, C. L. Lee, H. C. Shih. http://dx.doi.org/10.1063/1.124128)
- 68. M. Appl. Phys. Lett. 77, 3468 (2000). ( , T. Muneyoshi, T. Yaguchi, S. Sasaki. http://dx.doi.org/10.1063/1.1317534)
- 69. E. Thin Solid Films 208, 23 (1992). ( , C. V. Thompson. http://dx.doi.org/10.1016/0040-6090(92)90941-4)
- 70. J. Phys. Rev. Lett. 76, 652 (1996). ( , J. W. Evans, M. C. Bartelt, J. W. Burnett, P. A. Thiel. http://dx.doi.org/10.1103/PhysRevLett.76.652)
- 71. M. Phys. Rev. B 33, 5517 (1986). ( , H. Lefakis, F. K. LeGoues, G. W. Rublo. http://dx.doi.org/10.1103/PhysRevB.33.5517)
- 72. P. R. J. Vac. Sci. Technol. A 23, 1152 (2005). ( , A. P. Warren, R. M. Todi, R. V. Petrova, K. R. Coey. http://dx.doi.org/10.1116/1.1861943)
- 73. M. Diamond Relat. Mater. 10, 1235 (2001). ( , K. Eun, J. Lee, Y. Baik, K. Lee, J. Wan Park. http://dx.doi.org/10.1016/S0925-9635(00)00446-5)
- 74. S. Physica E 37, 1 (2007). ( , M. Cantoro, A. Parvez, S. Hofmann, A. C. Ferrari, J. Robertson. http://dx.doi.org/10.1016/j.physe.2006.06.014)
- 75. J. J. Mater. Chem. 13, 676 (2003). ( , J. Baea, S.-H. Yoon. http://dx.doi.org/10.1039/b212190e)
- 76. M. Diamond Relat. Mater. 15, 1029 (2006). ( , S. Hofmann, S. Pisana, C. Ducati, A. Parvez, A. C. Ferrari, J. Robertson. http://dx.doi.org/10.1016/j.diamond.2006.01.007)
- 77. H. Surf. Coat. Technol. 201, 938 (2006). ( , G. Cheng, Y. Zhao, R. Zheng, C. Liang, F. Zhao, T. Zhang. http://dx.doi.org/10.1016/j.surfcoat.2006.01.002)
- 78. T. Appl. Phys. Lett. 80, 2383 (2002). ( , F. Vonau, M. G. Garnier, V. Thommen, H.-G. Boyen, P. Oelhafen, M. Duggelin, D. Mathis, R. Guggenheim. http://dx.doi.org/10.1063/1.1465529)
- 79. T. Carbon 42, 187 (2004). ( , M. G. Garnier, P. Oelhafen, D. Mathys, J. W. Seo, C. Domingo, J. Vicente García-Ramos, S. Sánchez-Córtes. http://dx.doi.org/10.1016/j.carbon.2003.10.020)
- 80. C. Phys. E 40, 2238 (2008). ( , S. Hofmann, M. Cantoro, A. C. Ferrari, J. Robertson, C. Castellarin-Cudia, S. Dola, A. Goldoni, C. Cepek. http://dx.doi.org/10.1016/j.physe.2007.10.024)
- 81. Y. J. Mater. Sci.: Mater. Electron. 15, 583 (2004). ( , L. K. L. Falk, R. E. Morjan, O. A. Nerushev, E. E. B. Campbell. http://dx.doi.org/10.1023/B:JMSE.0000036037.84271.f0)
- 82. Y. J. Mater. Sci.: Mater. Electron. 15, 533 (2004). ( , L. K. L. Falk, R. E. Morjan, O. A. Nerushev, E. E. B. Campbell. http://dx.doi.org/10.1023/B:JMSE.0000032588.60083.56)
- 83. Y. Carbon 45, 2065 (2007). ( , L. K. L. Falk, R. E. Morjan, O. A. Nerushev, E. E. B. Campbell. http://dx.doi.org/10.1016/j.carbon.2007.05.020)
- 84. H. Luth. Solid Surfaces, Interfaces and Thin Films, Springer (2001).
- 85. N. Birks, G. Meier, F. Pettit. Introduction to the High-Temperature Oxidation of Metals, Cambridge University Press (2006).
- 86. T. J. Phys. Chem. C 111, 16392 (2007). ( , P. Oelhafen, V. Thommen, D. Mathys. http://dx.doi.org/10.1021/jp074928q)
- . R. Ficek, M. Eliáš, L. Zajíčková, O. Jašek, R. Vrba. Applications of Nanotubes and Nanowires, MRS Proceedings 1018E 1018EE1405 (2007).