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Pure Appl. Chem., 2008, Vol. 80, No. 9, pp. 1931-1937

Hollow cathode and hybrid atmospheric plasma sources

Hana Baránková and Ladislav Bardos

Ångström Laboratory, Plasma Group, Uppsala University, Uppsala, Box 534, SE-751-21, Sweden

Abstract: Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.