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Pure Appl. Chem., 2008, Vol. 80, No. 9, pp. 1909-1918

Self-organized nanoarrays: Plasma-related controls

Kostya (Ken) Ostrikov1,2, Igor Levchenko1 and Shuyan Xu3

1 Plasma Nanoscience, School of Physics, The University of Sydney, Sydney, NSW 2006, Australia
2 CSIRO Materials Science and Engineering, West Lindfield, NSW 2070, Australia
3 Plasma Sources and Applications Center, NIE and Institute of Advanced Studies, Nanyang Technological University, 637616, Singapore

Abstract: The paper presents an investigation of self-organizational and -assembly processes of nanostructure growth on surfaces exposed to low-temperature plasmas. We have considered three main growth stages-initial, or sub-monolayer growth stage, separate nanostructure growth stage, and array growth stages with the characteristic sizes of several nm, several tens of nm, and several hundreds of nm, respectively, and have demonstrated, by the experimental data and hybrid multiscale numerical simulations, that the plasma parameters can strongly influence the surface processes and hence the kinetics of self-organization and -assembly. Our results show that plasma-controlled self-organization is a promising way to assemble large regular arrays of nanostructures.