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Pure Appl. Chem., 2006, Vol. 78, No. 9, pp. 1715-1722

http://dx.doi.org/10.1351/pac200678091715

Spontaneous generation of negatively charged clusters and their deposition as crystalline films during hot-wire silicon chemical vapor deposition

Jin-Yong Kim1, Doh-Yeon Kim2 and Nong-Moon Hwang2

1 School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
2 School of Materials Science and Engineering and Nano-Systems Institute (NSI-NCRC), Seoul National University, Seoul 151-744, Korea

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