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Pure Appl. Chem., 2006, Vol. 78, No. 9, pp. 1715-1722

http://dx.doi.org/10.1351/pac200678091715

Spontaneous generation of negatively charged clusters and their deposition as crystalline films during hot-wire silicon chemical vapor deposition

Jin-Yong Kim1, Doh-Yeon Kim2 and Nong-Moon Hwang2

1 School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
2 School of Materials Science and Engineering and Nano-Systems Institute (NSI-NCRC), Seoul National University, Seoul 151-744, Korea

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  • Hong Ju-Seop, Kim Chan-Soo, Yoo Seung-Wan, Park Seong-Han, Lee Sung-Soo, Hwang Nong-Moon, Choi Hoo-Mi, Kim Dong-Bin, Kim Tae-Sung: Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition. Current Applied Physics 2013, 13, S45. <http://dx.doi.org/10.1016/j.cap.2012.12.016>
  • Hong Ju-Seop, Kim Chan-Soo, Yoo Seung-Wan, Park Seong-Han, Hwang Nong-Moon, Choi Hoo-Mi, Kim Dong-Bin, Kim Tae-Sung: In-Situ Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer. Aerosol Science and Technology 2013, 47, 46. <http://dx.doi.org/10.1080/02786826.2012.725959>
  • Lee Sung-Soo, Kim Chan-Soo, Hwang Nong-Moon: Generation of Charged Nanoparticles During the Synthesis of GaN Nanostructures by Atmospheric-Pressure Chemical Vapor Deposition. Aerosol Science and Technology 2012, 46, 1100. <http://dx.doi.org/10.1080/02786826.2012.693977>
  • Kim Chan-Soo, Youn Woong-Kyu, Hwang Nong-Moon: Generation of charged nanoparticles and their deposition during the synthesis of silicon thin films by chemical vapor deposition. J Appl Phys 2010, 108, 014313. <http://dx.doi.org/10.1063/1.3452352>
  • Hwang Nong-Moon, Lee Dong-Kwon: Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition. J Phys D Appl Phys 2010, 43, 483001. <http://dx.doi.org/10.1088/0022-3727/43/48/483001>
  • Kim Chan-Soo, Chung Yung-Bin, Youn Woong-Kyu, Hwang Nong-Moon: Generation of charged nanoparticles during the synthesis of carbon nanotubes by chemical vapor deposition. Carbon 2009, 47, 2511. <http://dx.doi.org/10.1016/j.carbon.2009.05.005>
  • Swain Bibhu P., Hwang Nong M.: Effect of negative substrate bias on HWCVD deposited nanocrystalline silicon (nc-Si) films. Solid State Sci 2009, 11, 467. <http://dx.doi.org/10.1016/j.solidstatesciences.2008.08.004>
  • Song Jean-Ho, Ahn Byung Du, Shin Seung-Doh, Hwang Nong-Moon, Kim Hyun Jae: Effect of wire temperature on the microstructural evolution of Si films in hot-wire chemical vapor deposition for digital display and photovoltaic devices. Solar Energy Mater Solar Cells 2009, 93, 324. <http://dx.doi.org/10.1016/j.solmat.2008.11.006>
  • Kim Chan-Soo, Chung Yung-Bin, Youn Woong-Kyu, Hwang Nong-Moon: Generation of Charged Nanoparticles during Synthesis of ZnO Nanowires by Carbothermal Reduction. Aerosol Sc & Tech 2009, 43, 120. <http://dx.doi.org/10.1080/02786820802499068>
  • Lee Jae-Ik, Hwang Nong-Moon: Generation of negative-charge carriers in the gas phase and their contribution to the growth of carbon nanotubes during hot-filament chemical vapor deposition. Carbon 2008, 46, 1588. <http://dx.doi.org/10.1016/j.carbon.2008.07.006>
  • Song Jean-Ho, Pak Sang Hoon, Hwang Nong-Moon, Kim Hyun Jae: Effect of negatively charged species on the growth behavior of silicon films in hot wire chemical vapor deposition. This Solid Films 2008, 516, 5122. <http://dx.doi.org/10.1016/j.tsf.2008.02.019>
  • Song Jean-Ho, Jo Wook, Hwang Nong-Moon: Non-uniform deposition in the early stage of hot-wire chemical vapor deposition of silicon: The charge effect approach. This Solid Films 2007, 515, 7446. <http://dx.doi.org/10.1016/j.tsf.2006.11.170>