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Pure Appl. Chem., 2006, Vol. 78, No. 6, pp. 1203-1211

Swift chemical sputtering of covalently bonded materials

K. Nordlund1, E. Salonen2, A. V. Krasheninnikov1 and J. Keinonen1

1 Accelerator Laboratory, University of Helsinki, P.O. Box 43, FIN-00014 Helsinki, Finland
2 Laboratory of Physics and Helsinki Institute of Physics, P.O. Box 1100, FIN-02015 HUT, Helsinki, Finland

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