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Pure Appl. Chem., 2005, Vol. 77, No. 2, pp. 415-428

http://dx.doi.org/10.1351/pac200577020415

Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena

H. Kersten1, G. Thieme2, M. Fröhlich2, D. Bojic2, D. H. Tung2, M. Quaas3, H. Wulff3 and R. Hippler2

1 Institute for Nonthermal Plasmaphysics (INP), F.-L.-Jahn-Strasse 19, D-17489 Greifswald, Germany
2 Institute for Physics, University of Greifswald, Domstrasse 10a, D-17487 Greifswald, Germany
3 Institute of Chemistry and Biochemistry, University of Greifswald, Soldmannstrasse 16/17, D-17487 Greifswald, Germany

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  • Hübner M., Fröhlich M., Tawidian H., Mikikian M., Röpcke J., Kersten H.: On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri-Isopropoxide Studied by FTIR Spectroscopy. Contrib. Plasma Phys. 2014, 54, 170. <http://dx.doi.org/10.1002/ctpp.201310065>
  • Polyakov D. N., Shumova V. V., Vasilyak L. M.: Positive column of glow discharge with dust particles. Surf. Engin. Appl.Electrochem. 2013, 49, 114. <http://dx.doi.org/10.3103/S1068375513020105>
  • Lopatik D., Niemietz S., Fröhlich M., Röpcke J., Kersten H.: Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isopropoxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers. Contrib. Plasma Phys. 2012, 52, 864. <http://dx.doi.org/10.1002/ctpp.201200044>
  • Kumar Shailesh, Levchenko Igor, Farrant David, Keidar Michael, Kersten Holger, Ostrikov Kostya (Ken): Copper-Capped Carbon Nanocones on Silicon: Plasma-Enabled Growth Control. ACS Appl. Mater. Interfaces 2012, 4, 6021. <http://dx.doi.org/10.1021/am301680a>
  • Röpcke J, Davies P B, Lang N, Rousseau A, Welzel S: Applications of quantum cascade lasers in plasma diagnostics: a review. J. Phys. D: Appl. Phys. 2012, 45, 423001. <http://dx.doi.org/10.1088/0022-3727/45/42/423001>
  • Ostrikov Kostya (Ken), Cvelbar Uros, Murphy Anthony B: Plasma nanoscience: setting directions, tackling grand challenges. J Phys D Appl Phys 2011, 44, 174001. <http://dx.doi.org/10.1088/0022-3727/44/17/174001>
  • Schubert G., Basner R., Kersten H., Fehske H.: Determination of sheath parameters by test particles upon local electrode bias and plasma switching. Eur Phys D 2011, 63, 431. <http://dx.doi.org/10.1140/epjd/e2011-20077-4>
  • Basner R, Sigeneger F, Loffhagen D, Schubert G, Fehske H, Kersten H: Particles as probes for complex plasmas in front of biased surfaces. New J Phys 2009, 11, 013041. <http://dx.doi.org/10.1088/1367-2630/11/1/013041>
  • Tung Do Hoang, Sushkov Vladimir, Hippler Rainer: Tunable diode laser absorption spectroscopy of argon metastable atoms in Ar/C2H2 dusty plasmas. New J Phys 2009, 11, 033020. <http://dx.doi.org/10.1088/1367-2630/11/3/033020>
  • Thieme Gabriele, Basner Ralf, Wiese Ruben, Kersten Holger: Microparticles in plasmas as diagnostic tools and substrates. Faraday Disc 2008, 137, 157. <http://dx.doi.org/10.1039/b703733n>
  • Do H T, Kersten H, Hippler R: Interaction of injected dust particles with metastable neon atoms in a radio frequency plasma. New J Phys 2008, 10, 053010. <http://dx.doi.org/10.1088/1367-2630/10/5/053010>
  • Nagai Takehiko, Smets Arno H. M., Kondo Michio: Formation of SiH3 Radicals and Nanoparticles in SiH4–H2 Plasmas Observed by Time-Resolved Cavity Ringdown Spectroscopy . Jpn J Appl Phys 2008, 47, 7032. <http://dx.doi.org/10.1143/JJAP.47.7032>
  • Do H. T., Thieme G., Fröhlich M., Kersten H., Hippler R.: Ion Molecule and Dust Particle Formation in Ar/CH4, Ar/C2H2 and Ar/C3H6 Radio-frequency Plasmas. Contrib Plasma Phys 2005, 45, 378. <http://dx.doi.org/10.1002/ctpp.200510043>