Pure and Applied Chemistry, 2004, Volume 76, No. 6, pp. 1161-1213, Other PAC articles by these authors

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Pure Appl. Chem., 2004, Vol. 76, No. 6, pp. 1161-1213

http://dx.doi.org/10.1351/pac200476061161

ANALYTICAL CHEMISTRY DIVISION

Critical evaluation of the state of the art of the analysis of light elements in thin films demonstrated using the examples of SiO_XN_Y and AlO_XN_Y films (IUPAC Technical Report)

Sabine Dreer* and P. Wilhartitz

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