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Pure Appl. Chem., 2002, Vol. 74, No. 9, pp. 1631-1641

Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon

P. Sen1 and J. Akhtar1,2

1 School of Physical Sciences, Jawaharlal Nehru University, New Delhi 110067, India
2 Microelectronics Technology Group, Semiconductor Devices Area, CEERI, Pilani, Rajasthan 333031, India

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