Pure and Applied Chemistry, 2002, Volume 74, No. 3, pp. 459-464, Other PAC articles by these authors

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PAC → Archive → Vol. 74 (2002) → Issue 3 → Comparative characterization of high-density… → Other PAC articles by these authors

Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 459-464

http://dx.doi.org/10.1351/pac200274030459

Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR

Yi-Kang Pu¹*, Zhi-Gang Guo¹, Zheng-De Kang¹, Jie Ma¹, Zhi-Cheng Guan¹, Guang-Yu Zhang² and En-Ge Wang²

¹ Department of Electrical Engineering, Tsinghua University, Beijing 100084, China
² Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China

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Yi-Kang Pu
Zhi-Gang Guo
Zheng-De Kang
Jie Ma
Zhi-Cheng Guan
Guang-Yu Zhang
En-Ge Wang

Pure and Applied Chemistry

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Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR

Individual author index pages

Other PAC articles by these authors