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Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 359-367

Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devices

Pere Roca i Cabarrocas, Anna Fontcuberta i Morral, Sarra Lebib and Yves Poissant

Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 ­ CNRS) Ecole Polytechnique, 91128 Palaiseau Cedex, France

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