Pure and Applied Chemistry

Pure Appl. Chem., 1999, Vol. 71, No. 10, pp. 1863-1869

http://dx.doi.org/10.1351/pac199971101863

Simulation of plasma processes for microelectronic fabrication

Individual author index pages

• R. P. Brinkman
• Matthias Kratzer
• H. Schmidt

Other PAC articles by these authors

No other articles by these authors.