Pure and Applied Chemistry, 1999, Volume 71, No. 10, pp. 1863-1869

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Pure Appl. Chem., 1999, Vol. 71, No. 10, pp. 1863-1869

http://dx.doi.org/10.1351/pac199971101863

Simulation of plasma processes for microelectronic fabrication

R. P. Brinkman, Matthias Kratzer and H. Schmidt

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14th International Symposium on Plasma Chemistry, Prague, Czech Republic, 2–6 August 1999

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