Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1187-1191
http://dx.doi.org/10.1351/pac199870061187
Phasespace modelling of a radiofrequency plasma interacting with surfaces
First page:
Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1187-1191
http://dx.doi.org/10.1351/pac199870061187